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A nonplanar Flash memory architecture with ultrahigh-density (~1.5 × 1012 cm-2) NiSi nanocrystals (NCs) as the floating gate is demonstrated using a triangular-shaped Si nanowire array as the memory transistor channel. The memory device shows good programming, erasing, and retention characteristics. This result suggests that nonplanar devices can extend NC memory scaling limit.
Date of Publication: Oct. 2012