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Quality factor enhancement of an Atomic Force Microscope micro-cantilever using piezoelectric shunt control

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2 Author(s)
Fairbairn, M.W. ; Sch. of Electr. Eng. & Comput. Sci., Univ. of Newcastle, Callaghan, NSW, Australia ; Moheimani, S.O.R.

The quality (Q) factor of the Atomic Force Microscope (AFM) micro-cantilever influences both the maximum scan speed and image quality when operating in tapping mode. Increasing the Q factor of the micro-cantilever results in an increase in force sensitivity and a reduction in tapping force. Active piezoelectric shunt control uses an active electrical impedance to modify the mechanical dynamics of the cantilever. An increase in the effective Q factor of a piezoelectric AFM micro-cantilever by over 25 times has been demonstrated using this technique.

Published in:

Advanced Intelligent Mechatronics (AIM), 2012 IEEE/ASME International Conference on

Date of Conference:

11-14 July 2012

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