A Novel MEMS Based Infrared Biosensor for Ultra-Sensitive Detection of Waterborne Pathogens

In this paper, a new concept of MEMS based biosensor is presented as a promising solution for the ultra- low level and real time detection of waterborne pathogens. This novel infrared biosensor employs the SiGe/Si quantum well thermistor with a high TCR and low 1/f noise to achieve a high sensitive detection through its resistance change with the absorption of infrared radiation from the dark quencher. Meanwhile, a manufacturing process applying the adhesive wafer bonding is proposed.