Cart (Loading....) | Create Account
Close category search window
 

High-Resolution Micro-Pirani Pressure Sensor With Transient Response Processing and Time-Constant Evaluation

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

8 Author(s)
Legendre, O. ; MiNaSys, Université Paris-Sud, Orsay, France ; Bertin, H. ; Garel, O. ; Zhang, Ming
more authors

A micro-Pirani pressure sensor, which consists of a pressure-dependent thermoresistance gauge, is traditionally exploited using a steady-state resistance measurement. Any signal variation occurs over an offset voltage due to the imperfection of the device, which affects the sensor's sensitivity. This paper presents, for the first time, an experimental investigation of a micro-Pirani gauge based on its dynamic behavior when heated by a current step. Such processing magnifies the pressure dependence of the gauge's signal by eliminating the constant offset influences on the measurement. Furthermore, a first-order low-pass filter step response identification of the experimental transient signal strongly reduces the noise influence on the measurement. Furthermore, such identification enables a direct calculation of the time constant. This paper investigates the pressure measurement based on the time-constant evaluation, which provides a range of measurement and a maximal sensitivity significantly shifted toward the atmospheric pressure compared to that of a traditionally processed Pirani gauge. The heating step, the recording of the transient response signal, and its digital postprocessing can be easily achieved by a small-sized controller. The proposed system provides a substantial performance enhancement of the micro-Pirani pressure sensor.

Published in:

Sensors Journal, IEEE  (Volume:12 ,  Issue: 10 )

Date of Publication:

Oct. 2012

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.