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Modeling and optimal design of piezoelectric cantilever microactuators

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2 Author(s)
DeVoe, D.L. ; Dept. of Mech. Eng., Maryland Univ., College Park, MD, USA ; Pisano, A.P.

A novel model is described for predicting the static behavior of a piezoelectric cantilever actuator with an arbitrary configuration of elastic and piezoelectric layers. The model is compared to deflection measurements obtained from 500-μm-long ZnO cantilever actuators fabricated by surface micromachining. Modeled and experimental results demonstrate the utility of the model for optimizing device design. A discussion of design considerations and optimization of device performance is presented

Published in:

Microelectromechanical Systems, Journal of  (Volume:6 ,  Issue: 3 )