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Highly efficient and long life metal–insulator–metal cathodes

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8 Author(s)
Kusunoki, Toshiaki ; Hitachi Research Laboratory, Hitachi Ltd., 1-1, Omika-cho 7, Hitachi, Ibaraki, 319-1292, Japan ; Suzuki, Mutsumi ; Sagawa, Masakazu ; Mikami, Yoshiro
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The authors improved the emission efficiency and lifetime of metal–insulator–metal cathodes. The drift of the diode current was suppressed by using a thinner tunneling insulator and a lower diode voltage. The cathode with a 7.9-nm-thick tunneling insulator kept the diode current stable at 0.5 A/cm2 for more than 20 000 h, although the initial emission efficiency declined from 2% to less than 0.5%, and the emission current drift increased. The decreased emission efficiency could be enhanced to more than 3% by mixing CsHCO3 into an Au/Pt/Ir multilayer top electrode.

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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:30 ,  Issue: 4 )