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Recent advances in MEMS sensor technology—thermo-fluid and electro-magnetic devices

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2 Author(s)

This is the final part of a three-part series on micro-electromechanical systems (MEMS) sensor technology. In the first part, a general introduction to MEMS sensing was given including the underlying principles [1]. Biomedical MEMS sensors were described and the principles of bio-sensing in a typical set of biologically inspired sensors were presented. The second part discussed mechanical sensors and their applications [2]. Some important issues of MEMS sensors were addressed, including the need to compensate for environmental effects, the Casimir effect, harvesting of energy for self-powered sensors, and the subject of sensor selection.

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Instrumentation & Measurement Magazine, IEEE  (Volume:15 ,  Issue: 3 )