Referenced Items are not available for this document.
This is the final part of a three-part series on micro-electromechanical systems (MEMS) sensor technology. In the first part, a general introduction to MEMS sensing was given including the underlying principles [1]. Biomedical MEMS sensors were described and the principles of bio-sensing in a typical set of biologically inspired sensors were presented. The second part discussed mechanical sensors and their applications [2]. Some important issues of MEMS sensors were addressed, including the need to compensate for environmental effects, the Casimir effect, harvesting of energy for self-powered sensors, and the subject of sensor selection.
Published in:
Instrumentation & Measurement Magazine, IEEE
(Volume:15
,
Issue:
3
)
Date of Publication: June 2012
- Page(s):
- 16 - 20
- ISSN :
- 1094-6969
- INSPEC Accession Number:
- 12761716
- Digital Object Identifier :
- 10.1109/MIM.2012.6204868
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 30 May 2012
- Issue Date :
- June 2012
- Sponsored by :
- IEEE Instrumentation and Measurement Society
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