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Traveling wave annular ultrasonic micromotors using bulk PZT

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3 Author(s)
Hareesh, P. ; Dept. of Mech. Eng., Univ. of Maryland, College Park, MD, USA ; Shuang Yang ; DeVoe, D.L.

This paper describes the development a novel traveling wave ultrasonic micromotor fabricated directly from low-cost and high-performance bulk piezoceramic PZT. We report a simpler approach to realizing traveling wave ultrasonic micromotors in which traveling waves are generated within a tethered annular stator microfabricated from a single sheet of bulk PZT. Actuation is achieved using interdigitated electrodes deposited on a single layer, enabling monolithic stators to be fabricated in a batch process from a single sheet of high quality bulk piezoceramic. The process requires only 2 photolithography steps, greatly simplifying design and manufacture while improving device performance and microfabrication costs.

Published in:

Microsystems for Measurement and Instrumentation (MAMNA), 2012

Date of Conference:

27-27 March 2012

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