By Topic

Software-defined microstrip antennas enabled through large vertical displacement zipper microactuators

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Jason Felder ; Dept. of Mechanical Engineering, University of Maryland, College Park, MD, USA ; Don L. DeVoe ; Eugene Lee ; Eric Walton

This paper describes a novel large-displacement electrostatic “zipper” microactuator capable of achieving hundreds of microns of out-of-plane deflection, and application of fabricated microactuators to the control of millimeter-scale microfabricated capacitive pixels enabling “software-defined” microstrip antennas. The software-defined microstrip patch antenna concept relies on a reconfigurable array of individually addressed pixels. Current antenna designs demand pixel footprints below 1 mm2, with 300 μm vertical deflections, 1 ms response times, and low power consumption. To address this challenge we have developed a new technology based on electrostatic zipper actuation, in which a curved beam is switched between bistable states by application of a voltage across a dielectric film separating the beam from a flat electrode surface. This technology is novel in its use of SiO2 as both a high quality dielectric and the stressed layer of the bimorph providing curved actuation, enabling large out-of-plane deflection and large forces.

Published in:

Microsystems for Measurement and Instrumentation (MAMNA), 2012

Date of Conference:

27-27 March 2012