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Low aspect-ratio Si nano-hemisphere array surface texturing compatible to thin film based solar cells is studied systematically for performance improvement. The light reflection can be significantly suppressed through varying the nano-hemisphere dimensions due to the spatial effective refractive index modulation. Owing to the excellent light trapping and also the nature of low aspect ratio (critical for conformal deposition of electrodes and achieving low surface defects), a short circuit current density (Jsc) of 37.4 mA/cm2 is realized, in distinct comparison with the Jsc of 20.4 mA/cm2 measured from the reference flat solar cells.
Date of Conference: 19-24 June 2011