Compact and highly selective millimeter-wave meandered bandpass filter using 0.18-µm CMOS technology

A compact and highly selective millimeter-wave CMOS on-chip bandpass filter (BPF) is designed and measured using 0.18-μm CMOS technology in this paper. The microstrip meandered resonators are adopted to shrink the component in a small occupied area. And the proper tapping positions which can create the dual-transmission zeros at both sides of the intended passband are investigated, and thus enhance the skirt selectivity of the filter. Furthermore, the slow-wave concept employed in the miniaturization of the proposed filter is also studied to provide account of physics. The core size of the chip is 211 × 211 μm
²
. The measured insertion loss at the operating frequency 62 GHz is 3.1 dB and the return loss is better than 10 dB. The measured and simulated results of the proposed BPF are in great agreement.