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Foil-level fabrication of inkjet-printed pyroMEMS balloon actuators

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4 Author(s)
D. A. de Koninck ; Ecole Polytechnique Fédérale de Lausanne (EPFL), STI IMT SAMLAB, Neuchâtel, Switzerland ; F. Molina Lopez ; D. Briand ; N. F. de Rooij

The fabrication, modeling and testing of a pyroMEMS balloon actuators are presented herein. A foil-level fabrication method was developed, integrating nickel-plated, inkjet-printed igniters capable of generating >;200 °C for ~1 s - sufficient for fuel combustion - and a low-temperature (120 °C) lamination technique using thick photodefinable epoxy sheets. Two different fuel mixtures and three different chamber volumes were tested. Balloon actuators (5 mm dia.) were successfully inflated, reaching over 5 mm in height. Maximum balloon heights were in good agreement with the semi-analytical model developed (28-35 % over prediction).

Published in:

Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on

Date of Conference:

Jan. 29 2012-Feb. 2 2012