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Piezoresistive SU-8 Cantilever With Fe(III)Porphyrin Coating for CO Sensing

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10 Author(s)
Reddy, C.V.B. ; Dept. of Mech. Eng., Srikalahasteeswara Inst. of Technol., Srikalahasthi, India ; Khaderbad, M.A. ; Gandhi, S. ; Kandpal, M.
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Carbon monoxide detection is required for various healthcare, environmental, and engineering applications. In this paper, 5,10,15,20-tetra (4,5-dimethoxyphenyl)-21H,23-Hporphyrin iron(III) chloride (Fe(III)porphyrin) coated on a piezoresistive SU-8 microcantilever has been used as a CO sensor. Rapid detection of CO down to 2 ppm has been observed with aforementioned sensors. Cantilevers without Fe(III)porphyrin have not responded to CO exposure. Fe(III)porphyrin-coated cantilever selectivity toward CO has been analyzed by measuring the sensor response to various gases such as N2, CO2, O2, ethanolamine, N2O, and moisture. The sensor has exhibited a fast response and recovery times and is fully recoverable after repeated exposures.

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Nanotechnology, IEEE Transactions on  (Volume:11 ,  Issue: 4 )