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Carbon monoxide detection is required for various healthcare, environmental, and engineering applications. In this paper, 5,10,15,20-tetra (4,5-dimethoxyphenyl)-21H,23-Hporphyrin iron(III) chloride (Fe(III)porphyrin) coated on a piezoresistive SU-8 microcantilever has been used as a CO sensor. Rapid detection of CO down to 2 ppm has been observed with aforementioned sensors. Cantilevers without Fe(III)porphyrin have not responded to CO exposure. Fe(III)porphyrin-coated cantilever selectivity toward CO has been analyzed by measuring the sensor response to various gases such as N2, CO2, O2, ethanolamine, N2O, and moisture. The sensor has exhibited a fast response and recovery times and is fully recoverable after repeated exposures.
Date of Publication: July 2012