This paper addresses the integrated circuit industry needs for non-isothermal simulation in device reliability analysis, initial input factor sensitivity analysis and their software implementation. The key reliability issues are the hot-electron induced oxide damages which result in the device degradation and electro-static discharge (ESD) damages which may cause failure in circuit operation. The main purpose of this work is to provide a design aid tool to improve device reliability and performance
Published in:
University/Government/Industry Microelectronics Symposium, 1997., Proceedings of the Twelfth Biennial
Date of Conference: 20-23 Jul 1997