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Equipment maintenance, operating costs and safety for Rochester Institute of Technology's Integrated Circuit Laboratory

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4 Author(s)
Fuller, L. ; Dept. of Microelectron. Eng., Rochester Inst. of Technol., NY, USA ; Blondell, S. ; Yackoff, D. ; Reynolds, C.

Having a cleanroom for microelectronics activities at a university is one thing. Keeping it stocked with supplies, the facility operating properly, and the equipment running is another thing. This paper describes the systems that have been established for the operation of the microelectronics facility at Rochester Institute of Technology

Published in:

University/Government/Industry Microelectronics Symposium, 1997., Proceedings of the Twelfth Biennial

Date of Conference:

20-23 Jul 1997

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