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This paper presents a simple yet effective method to determine the electrical model parameters of the dielectric barrier discharge (DBD) ozone chamber at frequencies above 20 kHz. The method is an alternative to the conventional Lissajous plot estimation method which appears to yield unsatisfactory results in this frequency range. Furthermore, the proposed technique allows for the chamber parameters to be determined at different frequencies-a flexibility which is not easily achievable using the typical Lissajous method. The measurement setup consists of a full-bridge inverter and a high-frequency variable inductor connected to the DBD chamber. The inductor can be adjusted to allow for parameter determination at different frequencies. The chamber parameters obtained from experimental results are validated by applying them in a high-voltage power supply for ozone generator.