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Four d.o.f. Piezoelectric Microgripper Equipped With a Smart CMOS Camera

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5 Author(s)
B. Tamadazte ; Franche-Comté Electronique Mécanique Thermique et Optique—Sciences et Technologies (UMR 6174), Centre National de la Recherche Scientifique/Université de Franche-Comté/École Nationale Supérieure de Mécanique et des Microtechniques/Université de Technologie de Belfort-Montbéliard, Besançon, France ; M. Paindavoine ; J. Agnus ; V. Petrini
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This letter deals with the design of a micro-eye-in-hand architecture. It consists of a smart camera embedded on a gripper. The camera is a high-speed (10 000 frames/s) complementary metal-oxide-semiconductor sensor of 64 × 64 pixels. Each pixel measures 35 μm × 35 μm and includes a photodiode, an amplifier, two storage capacitors, and an analog arithmetic unit. The gripper consists of a 4-degree-of-freedom (y+, y-, z+, z-) microprehensile system based on piezoelectric actuators.

Published in:

Journal of Microelectromechanical Systems  (Volume:21 ,  Issue: 2 )