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The term radio frequency (RF) microelectromechanical systems (MEMS) refers to electronic devices with a moving submillimeter-sized part (beam, comb, disc, or ring), which provide RF functionality. Alternative definitions include bulk or surface micromachined devices, such as thin film bulk acoustic resonators (FBARs), which rely on energy transduction from the electrical energy domain to the acoustic energy domain and vice versa to provide RF functionality. Many introductory articles and textbooks have been written on MEMS and RF MEMS. This article focuses on electrostatically actuated RF MEMS devices, such as RF MEMS switches, switched capacitors and varactors, and vibrating RF MEMS resonators.
Date of Publication: Jan.-Feb. 2012