By Topic

Hydrogen detection using thermally actuated MEMS resonators

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Tousifar, B. ; Dept. of Mech. & Mater. Eng., Univ. of Denver, Denver, CO, USA ; Rahafrooz, A. ; Pourkamali, S.

This work demonstrates the potential of thermally actuated micro-electromechanical resonators to be used as highly sensitive and fast sensors distinguishing between different gases and gas mixtures based on their thermo-physical properties. This approach is especially suitable for detection of hydrogen due to its extremely high thermal conductivity compared to other gases. On the other hand, as observed in our experiments, the resonant frequency of thermally actuated silicon micromechanical resonators is very sensitive to the thermal conductivity of its surrounding gases. This is expected to be mainly due to the induced changes in the static temperature of the resonator as the heat transfer coefficient changes with thermal conductivity of the surrounding gas. Frequency shifts as high as 3800ppm where measured for I-shaped resonators when their surrounding gas was changed from air to 100% hydrogen. Frequency deviation of 2200ppm was measured for a self sustained micromechanical thermal-piezoresistive oscillator upon its exposure to a hydrogen-air mixture with 100ppm hydrogen concentration.

Published in:

Sensors, 2011 IEEE

Date of Conference:

28-31 Oct. 2011