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Outlier distribution detection approach to semiconductor wafer fabrication process monitoring

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5 Author(s)
Huiyuan Cheng ; Monash University, Sunway Campus, Jalan Lagoon Selatan, Selangor, Malaysia ; Melanie Po-Leen Ooi ; Ye Chow Kuang ; Serge Demidenko
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It is well known that most of the defect clusters found on the fabricated semiconductor wafers have an assignable cause, which if rectified quickly can improve product quality and lower the production cost. This paper proposes a statistical correlation method that extends an existing Automatic Defect Cluster Analysis System (ADCAS). The method can be implemented in real-time such that the manufacturing cost would not be negatively affected. The proposed system generates a list of equipment having a high likelihood of causing the systematic failure. This technique is fast and easy to implement, and it provides early detection and prevention of failures associated with problematic equipment/process during manufacturing.

Published in:

Quality Electronic Design (ASQED), 2011 3rd Asia Symposium on

Date of Conference:

19-20 July 2011