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Silicon nanofabrication technologies for compact integrated receivers working at THz frequencies

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8 Author(s)
C. Jung ; Jet Propulsion Laboratory, California Institute of Technology, 4800 Oak Grove Drive, Pasadena, CA, 91109 - USA ; C. Lee ; G. Chattopadhyay ; J. Siles
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Silicon nanofabrication technologies provide precise dimensional control and batch processing capability. These features have been exploited to enable novel active and passive components in the submillimeter-wave region. We report on silicon micromachined methodologies that will enable large format submillimeter-wave heterodyne arrays and 3-D integration of the whole receiver front-end.

Published in:

Infrared, Millimeter and Terahertz Waves (IRMMW-THz), 2011 36th International Conference on

Date of Conference:

2-7 Oct. 2011