By Topic

Design of Contoured Thermomechanical Actuators and Pulsing Actuation to Enhance Dynamic Performance

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Shih-Chi Chen ; Department of Mechanical and Automation Engineering, The Chinese University of Hong Kong, Shatin, Hong Kong ; Martin L. Culpepper

This paper presents the concepts, models, and experimental validations of the geometric contouring method and a pulsing technique to enhance dynamic performance of micro thermomechanical actuators (μTMAs). For a typical TMA, contouring may improve its stroke, force, and speed performances by a factor of 4, 2.5, and 10, respectively. In the meantime, the required power for achieving the same performance is reduced by 40%. Herein, we show the following: 1) how to obtain marked dynamic and static performance from μTMAs; 2) how to model and optimize these improvements; and 3) how to use transient electrical command signals to augment these improvements. The utility and practical implementation of these techniques are illustrated via a case study on a stage from a three-axis optical scanner for a two-photon endomicroscope.

Published in:

Journal of Microelectromechanical Systems  (Volume:21 ,  Issue: 2 )