Fluorocarbon polymer films with regular void structure are prepared by using a patterning-fusion bonding process. The critical voltage necessary for the build-up of the 'macro dipoles' in the inner voids observed in the experiments agrees well with the calculated value. The fabricated films show improved thermal stability of the d33 coefficients.
Published in:
Electrets (ISE), 2011 14th International Symposium on
Date of Conference: 28-31 Aug. 2011