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Fluorocarbon polymer films with regular void structure are prepared by using a patterning-fusion bonding process. The critical voltage necessary for the build-up of the 'macro dipoles' in the inner voids observed in the experiments agrees well with the calculated value. The fabricated films show improved thermal stability of the d33 coefficients.
Electrets (ISE), 2011 14th International Symposium on
Date of Conference: 28-31 Aug. 2011