Referenced Items are not available for this document.
In order to improve lithographic accuracy, an image registration method based on spatial moments is suggested in this paper. First, match the reference image and the floating one using Fourier descriptors. This step is coarse matching. Second, locate edge accurately using spatial moments method and extract corner points. Finally, match the tow images according to the corner points extracted. This step is refine match. Experimental results show that accuracy of sub-pixel edge location can reach to 0.09 pixel and that of image registration can reach to 0.1 pixel.
Published in:
Computational Intelligence and Design (ISCID), 2011 Fourth International Symposium on
(Volume:2
)
Date of Conference: 28-30 Oct. 2011
- Page(s):
- 19 - 22
- Print ISBN:
- 978-1-4577-1085-8
- INSPEC Accession Number:
- 12386530
- Conference Location :
- Hangzhou
- Digital Object Identifier :
- 10.1109/ISCID.2011.106
- Product Type:
- Conference Publications
About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies
A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2013 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.
