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Steps to fabricate 3D overhanging nanostructures using focused ion beam

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6 Author(s)
Rajput, N.S. ; Dept. of Phys., Indian Inst. of Technol. Kanpur, Kanpur, India ; Sarkar, M. ; Banerjee, A. ; Shukla, N.
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Novel methodologies to overcome some of the difficulties in standard deposition procedures in focused ion beam (FIB) systems to fabricate 3D nanostructures are described. The geometrical restriction put on by the position of electron and ion columns and the precursor gas needles in a conventional FIB chamber, complicates the 3D fabrication process. As case studies, wide vertical walls and overhanging bridge-type structures of tungsten are fabricated. The overhanging bridge-type structure of tungsten can be used as a nanofilament for producing heat within a few micrometre distances. The heat, produced in the filament, is sensed by a tungsten-platinum nanothermocouple fabricated underneath the filament.

Published in:

Micro & Nano Letters, IET  (Volume:6 ,  Issue: 9 )