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Tunable RF filters with graded-composition, MOCVD-deposited BST Capacitors

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5 Author(s)
Kalkur, T.S. ; Dept. of Electr. & Comput. Eng., Univ. of Colorado, Colorado Springs, CO, USA ; Sbrockey, N. ; Loung, M. ; Cole, M.W.
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In this paper, we report the electrical characteristics of compositionally graded BST films deposited by metal organic chemical vapor deposition (MOCVD) on Pt coated sapphire substrates. We characterized the temperature dependent capacitance of graded composition BST capacitors along with single composition BST capacitors. We also report the fabrication and temperature dependent characterization of tunable RF filters fabricated with this technology.

Published in:
Applications of Ferroelectrics (ISAF/PFM), 2011 International Symposium on and 2011 International Symposium on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials

Date of Conference: 24-27 July 2011

Page(s):
1 - 4
E-ISBN :
978-1-4577-1161-9
Print ISBN:
978-1-4577-1162-6
INSPEC Accession Number:
12220989
Conference Location :
Vancouver, BC
Digital Object Identifier :
10.1109/ISAF.2011.6014112
Product Type:
Conference Publications

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