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In this paper, we report the electrical characteristics of compositionally graded BST films deposited by metal organic chemical vapor deposition (MOCVD) on Pt coated sapphire substrates. We characterized the temperature dependent capacitance of graded composition BST capacitors along with single composition BST capacitors. We also report the fabrication and temperature dependent characterization of tunable RF filters fabricated with this technology.
Date of Conference: 24-27 July 2011