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Progress in laboratory based X-ray microscopy

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4 Author(s)
Ebensperger, T. ; Lehrstuhl fur Rontgenmikroskopie, Julius-Maximilians-Univ. Wurzburg, Wurzburg, Germany ; Nachtrab, F. ; Sukowski, F. ; Hanke, R.

In recent years X-ray tomography has made progressive steps towards spatial resolution in the sub-micron range. A limiting factor is the finite focal spot size of state-of-the-art microfocus tubes. In this contribution we present a radiography setup with an X-ray source capable of generation focal spot sizes down to 80 nm, thanks to special targets designed using Monte Carlo simulations. Together with a high geometric magnification and a low-noise photon-counting detector this makes the setup ideal for material characterisation at the nanoscale.

Published in:

Vacuum Nanoelectronics Conference (IVNC), 2011 24th International

Date of Conference:

18-22 July 2011