Referenced Items are not available for this document.
Flexure mode oscillations in steel membranes at frequencies in the kilohertz range can be induced by piezoelectric coatings. The application of such macroscopic structures in the design of film thickness deposition monitors are demonstrated
Published in:
Applications of Ferroelectrics, 1996. ISAF '96., Proceedings of the Tenth IEEE International Symposium on
(Volume:2
)
Date of Conference: 18-21 Aug 1996
- Page(s):
- 951 - 954 vol.2
- Meeting Date :
- 18 Aug 1996-21 Aug 1996
- Print ISBN:
- 0-7803-3355-1
- INSPEC Accession Number:
- 5738520
- Conference Location :
- East Brunswick, NJ
- Digital Object Identifier :
- 10.1109/ISAF.1996.598184
- Product Type:
- Conference Publications
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