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Driven structures using piezoelectric coatings

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3 Author(s)
R. Noteboom ; Dept. of Phys., Queen's Univ., Kingston, Ont., Canada ; M. Sayer ; D. A. Barrow

Flexure mode oscillations in steel membranes at frequencies in the kilohertz range can be induced by piezoelectric coatings. The application of such macroscopic structures in the design of film thickness deposition monitors are demonstrated

Published in:

Applications of Ferroelectrics, 1996. ISAF '96., Proceedings of the Tenth IEEE International Symposium on  (Volume:2 )

Date of Conference:

18-21 Aug 1996