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Micro/nanofabrication of magnetic materials is becoming a crucial technology for future magnetic systems/devices such as high-density magnetic recording heads, high-density-patterned media, magnetic quantum devices, micro/nanomagnetic smart systems and so on. This work reports a prototype of mesa-structure, micromachined by sputtering NiFe alloys on SiO2 stripes, for potential applications in ensemble detection of nuclear spins. The status of the magnetic field present around the array of NiFe alloys was stimulated by ANSYS analysis. Subsequently, the mesa-structure array design was carried out according to the stimulated results of ANSYS analysis to obtain a strong magnetic gradient with homogeneous magnetic-flux density which was essential to the ensemble detection of nuclear spins. SiO2 stripes and the final mesa-structure were micromachined by means of micro-electro-mechanical systems technologies. The scanning electron microscope images demonstrated that the NiFe alloys were finely sputtered on SiO2 stripes with the ellipse-like shape. The final morphology of mesa-structure alloy was impacted by the vacuum degree in the sputtering process.
Date of Publication: July 2011