A CMOS-compatible 24MHz poly-SiGe MEMS oscillator with low-power heating for frequency stabilization over temperature

MEMS based timing devices have been proposed as an alternative to Quartz systems for certain applications. Through using an oven-controlled system it is possible to stabilize the frequency response of such a MEMS system over a large ambient temperature range. This work presents a BAW MEMS resonator in poly-SiGe which achieves significantly lower power consumption for frequency stabilization over temperature through Joule heating than for a similar system in SOI, while showing promising phase noise performance in an oscillator setup. Since the poly-SiGe resonator can be processed on top of standard CMOS, this enables the possibility of full integration of an Oven-Controlled MEMS Oscillator.