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A new N/MEMS-based nonvolatile circuit

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4 Author(s)
Yang, Hyun-Ho ; Dept. of Electr. Eng., Korea Adv. Inst. of Sci. & Technol. (KAIST), Daejeon, South Korea ; Seung-Deok Ko ; Jeong-Oen Lee ; Jun-Bo Yoon

This paper reports a new concept of a non-volatile circuit implemented by using nano/microelectro-mechanical system (N/MEMS). The proposed circuit can memorize its previous states with no power consumption when it is frozen by the disconnection of power. When re-powered, the circuit wakes up instantly and can continue the operation because it still holds the previous states. Demonstration was successfully done with a simple MEMS inverter. The logic state was maintained for less than 50sec in an air ambient due to the ambient leakage of charges, however, in a vacuum ambient (<;40mTorr), the state lasted over 105 sec without power.

Published in:

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Date of Conference:

5-9 June 2011