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Nanoscale multilayers as optical elements for X-ray photolitography

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7 Author(s)
Radic, N. ; Ruder Boskovic Inst., Zagreb, Croatia ; Salamon, K. ; Dubcek, P. ; Milat, O.
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The development of ever smaller electronic components by using a photolithographic process is limited by the wavelength of light. For the EUV and X-ray ranges the artificial multilayer coatings in the nanometer range are used as optical elements. From the viewpoint of both technology and optical properties, the tungsten/carbon combination is one of the best for X-ray radiation. In this work we have examined the effects of periodicity, tungsten phase composition, and number of W/C bilayers upon the reflectivity of hard X-rays. The W/C multilayers have been prepared by sequential RF/DC magnetron sputtering and characterized by GISAXS, TEM, and X-ray reflectivity methods.

Published in:

MIPRO, 2011 Proceedings of the 34th International Convention

Date of Conference:

23-27 May 2011

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