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Ultrafast laser processing of semiconductor devices

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11 Author(s)
Carey, J.E. ; SiOnyx, Inc., Beverly, MA, USA ; Pralle, M.U. ; Vineis, C.J. ; McKee, J.
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SiOnyx is developing ultrafast laser processing techniques that improve the performance of semiconductor based photodetectors, solar cells, and image sensors. Ultrafast laser processing offers the unique ability to locally engineer the structural and doping characteristics of semiconductor devices and avoid adverse side effects. Ultrafast laser processing is incorporated into a variety of devices to increase the collection of longer wavelength light and improve quantum efficiency while maintaining scalability and CMOS compatibility.

Published in:

Lasers and Electro-Optics (CLEO), 2011 Conference on

Date of Conference:

1-6 May 2011