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High-Performance Lateral-Actuating Magnetic MEMS Switch

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6 Author(s)
Glickman, M. ; Shocking Technol., Inc., San Jose, CA, USA ; Tseng, P. ; Harrison, J. ; Niblock, T.
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A lateral-actuating magnetic MEMS switch has been fabricated, which generates an estimated 200 μN of magnetic closing force with less than 0.7 V of actuation voltage and 13-mW power. The switch closes in 65 μs, reaches steady state within 200 μs, and has a powerful return force of 70 μN. The contact resistance was 0.1 to 0.4 Ω and lasted 3 ·106 cycles before failure. The device uses low-temperature processing (<; 300°C), low voltage, and substrate-agnostic fabrication technology that facilitates fabrication on (and integration with) a wide variety of substrates and technologies.

Published in:

Microelectromechanical Systems, Journal of  (Volume:20 ,  Issue: 4 )

Date of Publication:

Aug. 2011

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