By Topic

High-Performance Lateral-Actuating Magnetic MEMS Switch

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

6 Author(s)
Michael Glickman ; Department of Electrical Engineering, University of California at Los Angeles, Los Angeles, CA, USA ; Peter Tseng ; Jere Harrison ; Trevor Niblock
more authors

A lateral-actuating magnetic MEMS switch has been fabricated, which generates an estimated 200 μN of magnetic closing force with less than 0.7 V of actuation voltage and 13-mW power. The switch closes in 65 μs, reaches steady state within 200 μs, and has a powerful return force of 70 μN. The contact resistance was 0.1 to 0.4 Ω and lasted 3 ·106 cycles before failure. The device uses low-temperature processing (<; 300°C), low voltage, and substrate-agnostic fabrication technology that facilitates fabrication on (and integration with) a wide variety of substrates and technologies.

Published in:

Journal of Microelectromechanical Systems  (Volume:20 ,  Issue: 4 )