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High frequency ultrasonic transducer with KNN/BNT 0–3 composite active element

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7 Author(s)
Sien-ting Lau ; NIH Transducer Resource Center and Department of Biomedical Engineering, University of Southern California, Los Angeles, CA 90089 ; Xiang Li ; Xiabing Zhang ; Qifa Zhou
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High frequency ultrasonic transducer with operating frequency over 200 MHz has been fabricated using a composite sol gel technique. Piezoelectric lead-free thick film was prepared by dispersing the crystalline fine KNN powder into BNT precursor solution to form composite slurry which was spin-coated on the platinum buffered Si substrate. The resultant KNN/BNT film with thickness of 8 μm exhibited good dielectric and ferroelectric properties. A single element focused transducer with an f-number of 3 based on this composite film was built by conventional transducer technology and silicon etching process. The measured center frequency and the bandwidth at -6dB were 225 MHz and 68 MHz, respectively. Wire phantom imaging acquired by the composite transducer was also presented and spatial resolutions were assessed.

Published in:

2010 IEEE International Ultrasonics Symposium

Date of Conference:

11-14 Oct. 2010