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Full automatic on the fly optical macro wafer edge inspection system

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2 Author(s)
Kirmizigul, D. ; Inst. of Artificial Intell., Dresden Univ. of Technol., Dresden, Germany ; Frohlich, H.

We present a low cost optical macro inspection system for the wafer edge. The system is able to inspect the full wafer edge (front-, backside and apex) and provides a short feedback loop to the unit processes. Furthermore the use of image processing methods enables inspection without additional time loss. This inspection system can be installed on all wafer rotating tools with free space for hardware installation.

Published in:

Advanced Semiconductor Manufacturing Conference (ASMC), 2011 22nd Annual IEEE/SEMI

Date of Conference:

16-18 May 2011