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Parametric composite limited yield index for functional circuits yield prediction

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5 Author(s)
Jiun-Hsin Liao ; Semicond. R&D Center, IBM, Hopewell Junction, NY, USA ; Ahsan, I. ; Logan, R. ; Rudgers, G.
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In this paper we present an early detection mechanism for semiconductor circuit yield prediction and tracking. Several discrete devices used as components of functional circuits have been examined by their first-metal level test data and correlated to the higher metal level functional yield. A concept of Device Health Composite Yield is also introduced in this paper.

Published in:

Advanced Semiconductor Manufacturing Conference (ASMC), 2011 22nd Annual IEEE/SEMI

Date of Conference:

16-18 May 2011