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A digital test structure for simultaneous bird's beak length and misalignment measurement in polysilicon emitter bipolar technologies

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6 Author(s)
Ullan, M. ; Centro Nacional de Microelectron., Univ. Autonoma de Barcelona, Spain ; Lozano, M. ; Santander, J. ; Lora-Tamayo, E.
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A test structure for geometrical measurements on bipolar processes is presented. Both bird's beak length and misalignment between active areas and active area openings in a polysilicon emitter bipolar technology can be obtained from a unique measurement using it. Although it is a digital structure, the accuracy can be improved by means of a fitting on the contact resistance values. Another structure for obtaining misalignment, based on the voltage-dividing potentiometer principle, is included in order to compare results

Published in:

Microelectronic Test Structures, 1997. ICMTS 1997. Proceedings. IEEE International Conference on

Date of Conference:

17-20 Mar 1997