Cart (Loading....) | Create Account
Close category search window
 

A digital test structure for simultaneous bird's beak length and misalignment measurement in polysilicon emitter bipolar technologies

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

6 Author(s)
Ullan, M. ; Centro Nacional de Microelectron., Univ. Autonoma de Barcelona, Spain ; Lozano, M. ; Santander, J. ; Lora-Tamayo, E.
more authors

A test structure for geometrical measurements on bipolar processes is presented. Both bird's beak length and misalignment between active areas and active area openings in a polysilicon emitter bipolar technology can be obtained from a unique measurement using it. Although it is a digital structure, the accuracy can be improved by means of a fitting on the contact resistance values. Another structure for obtaining misalignment, based on the voltage-dividing potentiometer principle, is included in order to compare results

Published in:

Microelectronic Test Structures, 1997. ICMTS 1997. Proceedings. IEEE International Conference on

Date of Conference:

17-20 Mar 1997

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.