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Computer system design for continuous gas monitoring

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2 Author(s)
W. A. Kilinskas ; Praxair Inc., Tonawanda, NY, USA ; R. B. Mazzarella

Summary for only given, as follows. The purity of gases used in semiconductor manufacturing have to be continuously monitored to ensure quality control. Gas monitoring systems have been developed and installed at several manufacturing sites for this application. Analytical instruments, sampling systems, and computer systems have been incorporated in these panels to enable continuous monitoring of ultra high purity gases. This presentation describes the computer systems which perform multiple tasks such as analyzer status monitoring. A functional computer design is presented with example of hardware and software implementations. A description of a real time, multitasking STD BUS system is included

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop. 1994 IEEE/SEMI

Date of Conference:

14-16 Nov 1994