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Implementing automated equipment performance control in the manufacturing work cell

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1 Author(s)
Pomorski, T. ; Data Manage. Div., Nat. Semicond. Corp., South Portland, ME, USA

This paper describes a design and implementation roadmap utilized to establish automated manufacturing equipment controls within the class 100 wafer fabrication area of the National Semiconductor, Data Management Division, South Portland, Maine, facility. The integration of automated equipment controls, including recipe downloads, process parameter verification, and real-time performance monitoring is a key element in the creation of a High Performance Manufacturing Work Cell. The design and implementation of equipment control follows a structured process which ensures alignment with the organization's mission, goals, and core values. The process roadmap begins with the work cell vision and continues through sequential development to a fully functional equipment control implementation. The roadmap also suggests tools and documentation to support the development process. As an integral component in the work cell design, automated equipment performance control offers potential benefits in work cell productivity, product yields, cycle time, and resource utilization. Specific examples of successful equipment control, including interface options for non-SECS compatible equipment, are discussed

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop. 1994 IEEE/SEMI

Date of Conference:

14-16 Nov 1994