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Si IC-compatible inductors and LC passive filters

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2 Author(s)
Nguyen, N.M. ; Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA ; Meyer, R.G.

Passive inductors and LC filters fabricated in standard Si IC technology are demonstrated. Q-factors from three to eight and inductors up to 10 nH in the gigahertz range have been realized. Measurements on a five-pole maximally flat low-pass filter give midband insertion loss and -3 dB bandwidth close to the nominal design values of 2.25 dB and 880 MHz

Published in:

Solid-State Circuits, IEEE Journal of  (Volume:25 ,  Issue: 4 )
RFIC Virtual Journal, IEEE