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An ultrasonic rangefinder has a working range of 30 to 450 mm and operates at a 375-Hz maximum sampling rate. The random noise increases with distance and equals 1.3 mm at the maximum range. The range measurement principle is based on pulse-echo time-of-flight measurement using a single transducer for transmit and receive. The transducer consists of a piezoelectric AlN membrane with 400-μm diameter, which was fabricated using a low-temperature process compatible with processed CMOS wafers. The performance of the system exceeds the performance of other micromechanical rangefinders.
Published in:
Sensors Journal, IEEE
(Volume:11
,
Issue:
11
)
Date of Publication: Nov. 2011
- Page(s):
- 2690 - 2697
- ISSN :
- 1530-437X
- INSPEC Accession Number:
- 12300733
- Digital Object Identifier :
- 10.1109/JSEN.2011.2157490
- Product Type:
- Journals & Magazines
- Date of Publication :
- 23 May 2011
- Date of Current Version :
- 17 October 2011
- Issue Date :
- Nov. 2011
- Sponsored by :
- IEEE Sensors Council
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