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Mechanical model of a MEMS inertial rotational gyroscope

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5 Author(s)
Braghin, F. ; Mechanical Engineering Department, Politecnico di Milano, 20158, Italy ; Leo, E. ; Resta, F. ; Castro, Andrea
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The verification phase (Final Test) of inertial MEMS gyroscopes design properties takes a basic role in the sensors production. It's during this phase that devices are tested to reveal their effectiveness in the survey of the angular rate. The verification phase is based on a set of several tests able to evaluate the gyroscope characteristic properties, such as the resonance frequency, the quality factor, the quadrature error, and the gyroscope sensitivity. The main goal of the Final Test is to identify characteristic parameters as far as possible in order to save money: actually each gyroscope has to be tested before putting it on the market. The test bench used during the Final Test phase will be proposed as well as a new experimental procedure able to fast identify characteristic parameters. This new testing procedure has been applied both for single-axis and double-axis gyroscopes. The results achieved has been compared with a more accurate (but slower) experimental procedure.

Published in:

Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2011 12th International Conference on

Date of Conference:

18-20 April 2011