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In this paper we demonstrate a system-level simulation of a temperature controlled microsystem which is based on a reduced order model of a micro hotplate. Together with the electro-thermal microstructure we have implemented a control scheme, which allows the hotplate to operate either at a defined setpoint independent of ambient temperature or to follow defined temperature sweeps. An optimization algorithm was employed to identify suitable parameters for a PI-controller.
Date of Conference: 18-20 April 2011