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Frequency Tuning of \hbox {VO}_{2} -Coated Buckled Microbridges

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5 Author(s)
Merced, Emmanuelle ; Dept. of Electr. & Comput. Eng., Univ. of Puerto Rico Mayaguez, Mayaguez, Puerto Rico ; Cabrera, Rafmag ; Coy, Horacio ; Fernandez, Felix E.
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This letter reports a resonant frequency shift of approximately - 23% for a VO2-coated silicon dioxide (SiO2) buckled microbridge when the coating's insulator-to-metal transition (IMT) is thermally induced by heat conduction using a Peltier heater or by light irradiation from a laser diode. The frequency tuning is attributed to the large stress levels developed during the IMT and the large sensitivity of buckled microbridges to changes in stress.

Published in:

Microelectromechanical Systems, Journal of  (Volume:20 ,  Issue: 3 )