By Topic

Building and Reducing a Three-Field Finite-Element Model of a Damped Electromechanical Actuator

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Hannot, S.D.A. ; Dept. of Precision & Microsyst. Eng., Delft Univ. of Technol., Delft, Netherlands ; Rixen, D.J.

In this paper, we describe a model to simulate the dynamics of a microactuator. The model is based on a finite-element discretization which gives a monolithic description of the strong coupling between the mechanical, electrostatic, and fluid fields. It therefore allows the computation of the nonlinear dynamic response of a microactuator. The methodology also leads in a natural way to the fully coupled linearized equations so that computing vibration behavior becomes feasible. In this paper, we also show how the model can be reduced in order to significantly decrease the computation costs while retaining a good accuracy even when nonlinear effects are significant. The proposed method is validated for a microbridge for which measurements found in literature were used.

Published in:

Microelectromechanical Systems, Journal of  (Volume:20 ,  Issue: 3 )