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A Single-Polarity Piezoresistive Three-Dimensional Stress-Sensing Rosette

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2 Author(s)
Gharib, H.H. ; Dept. of Mech. Eng., Univ. of Alberta, Edmonton, AB, Canada ; Moussa, W.A.

This letter presents a study on the feasibility of a new approach for developing a piezoresistive (PR) stress-sensing rosette that is capable of extracting the six stress components with temperature compensation using single-polarity sensing elements (n-type only). Current publicly available PR 3-D stress rosettes extract only four temperature-compensated stresses using a dual-polarity (n- and p-type) rosette. Our proposed approach generates a new set of independent equations based on varying the impurity concentration of the sensing elements and utilizes the distinct properties of the shear PR coefficient (π44) in n-Si. Fabrication of a single-polarity rosette requires less equipment compared to that of a dual-polarity rosette and helps reduce the footprint of the rosette.

Published in:

Microelectromechanical Systems, Journal of  (Volume:20 ,  Issue: 3 )