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Integrated MEMS platform with silicon nanotweezers and open microfluidic device for molecular and cellular biomechanical assays

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13 Author(s)
M. Kumemura ; LIMMS/CNRS-IIS, The University of Tokyo, JAPAN ; D. Collard ; R. Tourvielle ; N. Lafitte
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This paper describes an integrated bio-reaction platform composed of silicon nanotweezers and open microfluidics for real time biomechanical assays. The silicon nanotweezers can sense slight biological modification of the trapped sample due to stable frequency response with high Q factor in liquid. The microfluidic device integrates active valves for controlling the biological medium. Biomolecular assay (DNA/Hind III enzymatic reaction kinetics), and cell contraction/relaxation dynamic assay illustrate the capabilities of this integrated platform that is a breakthrough capability for real time and routine biological tests.

Published in:

Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on

Date of Conference:

23-27 Jan. 2011