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Mechano-optical switching in a MEMS integrated photonic crystal slab waveguide

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7 Author(s)
Abdulla, S.M.C. ; Transducers Sci. & Technol. Group, Univ. of Twente, Enschede, Netherlands ; Kauppinen, L.J. ; Dijkstra, M. ; Berenschot, E.
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A photonic crystal slab waveguide (PhC-WG) with an integrated MEMS bimorph cantilever actuator has been successfully fabricated using deep UV lithography and surface micromaching techniques. The cantilever is equipped with tips that are self-aligned with respect to the holes of the PhC-WG such that on electrostatic actuation, with modest voltages of less than 10 V, these tips move into the holes. This provides electro-opto-mechanical modulation of light-transmission, up to 80%, for interaction lengths as short as 10 μm. The device is monolithically integrated and designed to operate in the C-band of the telecommunication wavelengths.

Published in:

Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on

Date of Conference:

23-27 Jan. 2011